Silicon Designs: Variable Capacitive Accelerometers
Model 1410 is a family of digital pulse density output MEMS variable-capacitive (VC) accelerometers designed to reliably measure both vibration and acceleration with very low power consumption and high long-term bias stability (1,000 ppm typical). This makes them ideal for use within low-current applications consuming only 2 mA with 5-V excitation. The Model 1410 uses a clock frequency between 100 KHz and 1.0 MHz and produces a pulse density output relative to acceleration. Units are available in seven unique standard ranges, from ±2 g to ±200 g, with sensitivities from 0.625 kHz/g (200 g range) to 62.5 kHz/g (2 g range). Frequency response is 0-400 Hz (±2 g) to 0-2,000 Hz (±200 g) at fixed intervals, according to selected g range, successfully responding to dc (continuous) and dynamic acceleration. A robust MEMS VC accelerometer design allows the Model 1410 to withstand mechanical shock inputs up to 5,000 g (2,000 g on low-range units — 2g and 5g FSO) without damaging the unit.