Silicon Microstructures Inc.: Low-Pressure Sensors
The SM9541 MEMS low-pressure sensor series’ unique gage and differential offering allows for optimal signal resolution and diagnostics capabilities. Fourteen-bit resolution and 1 percent accuracy provide the user high performance while the 0.2 percent full-scale offset stability per year provides long-term reliability needed for critical applications. The SM9541 features an I2C digital interface and is available in low-pressure ranges of 10, 20, 40, and 100 centimeters of water (0.14, 0.3, 0.6, and 1.4 psi). Custom solutions are available for custom pressure and temperature ranges.