The MFS02 micro flow sensor utilizes thin film technology to layer platinum micro heaters and temperature sensors on an ultrasensitive polymer membrane. The sensor is capable of measuring the thermal mass flow of gases in a range from 0.001 to 2 meters per second (up to 50 meters per second), and has a chip temperature range of -40 to 150°C. It employs a special glass substrate with an ultra thin polymer membrane to achieve extreme sensitivity. A high-performance material, the polymer is characterized by outstanding thermal, mechanical, and chemical behaviors. Reduced thermal conductivity of the polymer membrane leads to better thermal contrast and thus better sensitivity. Additionally, the sensor’s glass substrate allows for a much higher operating temperature, making the measurement of larger flow rates possible. The sensor features a rugged design that is well-suited for soldering, conductive gluing, or wire bonding. The sensor element can be mounted as an assembly on an electronic PCB or other carrier, and is ideal for mounting in a bypass flow assembly for differential pressure applications. An EVA kit is available for performance evaluation of the MFS02.

Innovative Sensor Technology USA, 4055 S. Spencer #100, Las Vegas, NV 89119; 702-894-9891; 702-894-9993 (fax);

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